Direct Deposition of Metal Film Patterns Using Nitrogen Laser
نویسندگان
چکیده
منابع مشابه
Direct Deposition of Metal Film Patterns Using Nitrogen Laser
Rhenium, gold and platinum film micropatterns were obtained by the LCVD method on the surface of silicon and glass substrates from vapors of R ~ z ( C O ) ~ ~ , (CHg)~Au(dpni), P t ( l~fa)~, respectively. The heated reaction chamber at atmospheric pressure with a flow of an inert gas-carrier was used. The high marginal sharpness and the thickness uniformity of deposited films was provided by th...
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ژورنال
عنوان ژورنال: Le Journal de Physique IV
سال: 1995
ISSN: 1155-4339
DOI: 10.1051/jphyscol:1995582